Measuring range available when set to “No extra-fine wire measurement”or “Edge specification” in the basic setup mode.
Environment for accuracy validation: 20°C 1°C temperature; 50% 10% humidity.
The value of 2 o with a 2mm-diameter gage has been measured for two minutes with a measurement interval of 0.32 seconds, where is the standard deviation.
The value of measurements in the center of the measurement region.
Error due to the positional shift of the workpiece in the optical axis direction or scanning direction
Averaging scans between 1 and 8 times can be made if “No extra-fine wire measurement” is specified in the basic setup mode.
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