This model is a highly sensitive C5F8 / C4F6 / or C3F6 gas monitor which uses a special techniquie for detecting C5F8, C4F6 or C3F6. into more readily detectable compounds.
Then, the resulting compounds cause a chemical reaction on a colorimetric tape, and the intensity of the chemical reaction is analyzed and correlated to a specific ppm level of C5F8, C4F6 or C3F6 present in the sample. The detection tape is in a handy cassette which is easily removed for periodic replacement.
Product Highlights
- Ideal for low gas concentration
- Ideal for monitoring semiconductor fab clean rooms
- Minimal interference from solvents such as Fluorinert and Galden
- Easily replaceable plug-in tape cassette
- Cassette tape remainder display included
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